The 41st Annual Meeting of The Laser Society of Japan

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Oral Presentation

D: Laser processing

[D05-20a-IV] 材料プロセシング

Wed. Jan 20, 2021 9:15 AM - 10:30 AM IV

Chair:Yasutaka Hanada

10:15 AM - 10:30 AM

[D05-20a-IV-05] KrFエキシマレーザーを用いたSiCレーザードーピング後の表面状態パルス幅依存性の解明

*Toshifumi Kikuchi1, Daisuke Nakamura1, Hiroshi Ikenoue1 (1. Kyushu Univ.)

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