The 44th Annual Meeting of The Laser Society of Japan

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Oral Presentation

H: Optical information processing

[H03-17p-IV] Interferometry

Wed. Jan 17, 2024 1:15 PM - 3:00 PM Room IV (Plaza Heisei_Conference Room2)

Chair: Akihiro Takita, Kouichi Nitta

1:45 PM - 2:15 PM

[H03-17p-IV-02] 【招待講演】
高感度レーザー微分干渉計測による半導体ウェハ面上のnmスケール欠陥検出法

*Masato Ishizuka1, Toshifumi Honda1, Takeru Utsugi1, Yukinobu Tanaka1, Yong lee1, Shogo Iguchi1, Ryuji Ukai1, Mayumi Nagayoshi1 (1. Hitachi, Ltd.)

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