Effects of Carbon Nanoparticle Interposed between Two Hydrogenated Amorphous Carbon Films on Surface Morphology of a-C:H Film

Shinjiro Ono

[G1-P501-07] Effects of Carbon Nanoparticle Interposed between Two Hydrogenated Amorphous Carbon Films on Surface Morphology of a-C:H Film

*Shinjiro Ono¹, Manato Eri¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Naoto Yamashita¹, Naho Itagaki¹, Kazunori Koga¹, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan))

キーワード：Plasma, Hydrogenated Amorphous Carbon, Carbon Nanoparticle, AFM, Stress Reduction

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講演情報

[G1-P501] Poster 501

[G1-P501-07] Effects of Carbon Nanoparticle Interposed between Two Hydrogenated Amorphous Carbon Films on Surface Morphology of a-C:H Film