SISPAD2023

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Poster

[P] Poster Session

Thu. Sep 28, 2023 3:00 PM - 4:30 PM Meeting Room1

Chair: Shunsuke Koba (Kobe City Col. Tech.), Hideki Minari (Sony Semiconductor Solutions)

[P-02] Change of electrical characteristics of a p-type MOSFET via hydrogen effect on boron redistribution

*Youngrok Kim1, Chihak Ahn2, Alexander Schmidt1, Joohyun Jeon1, Sae-Jin Kim1, Hakseon Kim1, Hyunjae Kim1, Hyeyoung Kwon1, Yero Lee1, Sung Jin Kim1, Dongjin Lee1, Jaeduk Lee1, Dae Sin Kim1 (1. Samsung Electronics Co., Ltd., 2. Samsung Semiconductor Inc.)

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