Molecular Dynamics Study of Al Implantation in 4H-SiC

Presentation information

Poster

Thu. Sep 28, 2023 3:00 PM - 4:30 PM Meeting Room1

Chair: Shunsuke Koba (Kobe City Col. Tech.), Hideki Minari (Sony Semiconductor Solutions)

Sabine Leroch¹, *Robert Stella¹, Andreas Hössinger², Lado Filipovic¹ (1. University of Technology Vienna, 2. Silvaco Ldt Europe)

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