Green Laser Crystallized Poly-Si Thin-film Transistor and CMOS Inverter using HfO<sub>2</sub>-ZrO<sub>2</sub> Superlattice Gate Insulator  and Microwave Annealing for BEOL Applications

Chih-Hsiang Chang

15:50 〜 16:10

[5-05] Green Laser Crystallized Poly-Si Thin-film Transistor and CMOS Inverter using HfO₂-ZrO₂ Superlattice Gate Insulator and Microwave Annealing for BEOL Applications

*Chih-Hsiang Chang¹, Siao-Cheng Yan¹, Chong-Jhe Sun¹, Ming-Yueh Huang¹, Bo-An Chen¹, Xin-Chan Zhong¹, Yi-Wen Lin¹, Yung-Chun Wu¹ (1. National Tsing Hua Univ. (Taiwan))

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講演情報

[5] Advanced CMOS Technology

[5-05] Green Laser Crystallized Poly-Si Thin-film Transistor and CMOS Inverter using HfO₂-ZrO₂ Superlattice Gate Insulator and Microwave Annealing for BEOL Applications

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講演情報

[5] Advanced CMOS Technology

[5-05] Green Laser Crystallized Poly-Si Thin-film Transistor and CMOS Inverter using HfO2-ZrO2 Superlattice Gate Insulator and Microwave Annealing for BEOL Applications

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[5-05] Green Laser Crystallized Poly-Si Thin-film Transistor and CMOS Inverter using HfO₂-ZrO₂ Superlattice Gate Insulator and Microwave Annealing for BEOL Applications