[P-08] Optimization of Ferroelectricity in Al-Doped HfO2 Capacitors: Electrical and Endurance Characteristics
*Dong Ru Hsieh1, Huai En Luo1, Jia Chian Ni1, Zi Yang Hong1, Yi Hsiu Chen1, Wei Ju Yeh1, Tien Sheng Chao1(1. National Yang Ming Chiao Tung Univ. (Taiwan))