2022 International Conference on Solid State Devices and Materials

講演情報

Oral Presentation

05: Photonics: Devices / Integration / Related Technology

[A-9] Imaging Sensors and Detectors

2022年9月29日(木) 13:30 〜 15:15 101 (1F)

Session Chair: Mizuki Shirao (Mitsubishi Electric Corp.), Frederic Boeuf (STMicroelectronics)

15:00 〜 15:15

[A-9-07] Fabrication of 3 µm Pixel Pitch InGaAs Photodiodes using Be Implantation Doping for SWIR sensing

〇Jules Tillement1,2,3, Cyril Cervera2, Jacques Baylet2, Olivier Gravrand2, Quentin Lalauze2, Christophe Jany2, Thomas Di Rito2, Olivier Saxod2, Norbert Moussy2, Thierry Baron3, Francois Roy1, Frederic Boeuf1 (1. STMicroelectronics (France), 2. Universite Grenoble Alpes, CEA Leti (France), 3. Universite Grenoble Alpes CNRS, LTM (France))

Presentation style: On-site (in-person)

https://doi.org/10.7567/SSDM.2022.A-9-07

In this work, we present a process of InGaAs photodiode manufacturing with Be implantation as the p-type doping method. We show successful realization of photodiodes arrays by spectral response for pixel pitch ranging from 15µm to 3µm, which is the lowest published pixel pitch to date for InGaAs photodetectors. The measured dark current density for our best case presented here is 10-6 A.cm-2 at -0.2V at 300K. Be profile and defects density after activation anneal are discussed as potential leads for further optimization.

Abstract password authentication.
Password to download abstracts has been informed in the confirmation mail.

パスワード