Reliability Study of Stacked high-k Metal-Insulator-Metal Capacitors

Presentation information

Oral Presentation

10: Thin Film Electronics: Oxide / Non-single Crystalline / Novel Process

Tue. Sep 27, 2022 11:30 AM - 12:45 PM 105 (1F)

Session Chair: Jun Koyama (Semiconductor Energy Lab.), Juan Paolo Bermundo (NAIST)

11:30 AM - 11:45 AM

Wei-Hua Chen¹, 〇Gui-Sheng Chao¹, Chrong-Jung Lin¹, Ya-Chin King¹ (1. Univ. of Hsinchu (Taiwan))

Presentation style: Online

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