[E-6] Advanced Oxide Sensors

[E-6-03] Developing SnO₂ Based Flexible Humidity Sensor on Ultra-Soft Substrate for Breath Detection

〇Moumita Deb¹, Po- Yi Chang^1,2,3, Pin- Hsuan Li¹, Ming- Jen Chen^4,5, Ya- Chuang Tian^4,5, Olivier Soppera^2,3, Hsiao- Wen Zan¹ (1. Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung Univ. (Taiwan), 2. Université de Haute-Alsace, CNRS (France), 3. Université de Strasbourg (France), 4. Department of Medicine, Chang Gung Univ. (Taiwan), 5. Kidney Research Center and Department of Nephrology, Linkou Chang Gung Memorial Hospital (Taiwan))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.E-6-03

We have demonstrated SnO2 based flexible humidity sensor on food plastic wrap at low annealing tempera-ture (26.2 oC). As prepared sol-gel SnO2 film was an-nealed by low power near infrared (NIR) laser power 16 W/cm2. The proposed sensor has been tested under dif-ferent humidity (RH = 10 ~ 60%) with excellent resolu-tion (1.1% response per 0.1% RH). In addition, the sen-sor should be used to detect respiratory diseases by breath analysis.