2022 International Conference on Solid State Devices and Materials

講演情報

Oral Presentation

03: Interconnect / 3D Integrations / MEMS

[E-7] MEMS and Advanced Metallization II

2022年9月29日(木) 09:00 〜 10:45 105 (1F)

Session Chair: Akinobu Yamaguchi (Univ. of Hyogo), Takeo Minari (NIMS)

10:30 〜 10:45

[E-7-06 (Late News)] Control of Surface Oxidation and Stress by Additives in Ni Electrodeposition

〇Takeyasu Saito1, Kohei Yamada1, Ryosuke Komoda1, Naoki Okamoto1 (1. Osaka Metropolitan University (Japan))

Presentation style: On-site (in-person)

https://doi.org/10.7567/SSDM.2022.E-7-06

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