CMOS Technology Beyond FINFET : Challenges and Opportunities

Kai Zhao

doi:https://doi.org/10.7567/SSDM.2022.G-7-01

講演情報

Oral Presentation

01: Advanced CMOS: Material Fundamentals / Process Science / Device Physics

[G-7] Advanced CMOS: Device Technology

2022年9月29日(木) 09:00 〜 10:15 301 (3F)

Session Chair: Keisuke Yamamoto (Kyushu Univ.), Anabela Veloso (imec)

09:00 〜 09:30

[G-7-01 (Invited)] CMOS Technology Beyond FINFET : Challenges and Opportunities

〇Kai Zhao¹, Julien Frougier¹, Nicolas Loubet¹, Hemanth Jagannathan¹, Brent Anderson¹, Gen Tsutsui¹, Liqiao Qin¹, Jingyun Zhang¹, Shogo Mochizuki¹, Teresa Wu¹, Dechao Guo¹, Huiming Bu¹ (1. IBM (United States of America))

Presentation style: On-site (in-person)

https://doi.org/10.7567/SSDM.2022.G-7-01

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講演情報

[G-7] Advanced CMOS: Device Technology

[G-7-01 (Invited)] CMOS Technology Beyond FINFET : Challenges and Opportunities

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