2022 International Conference on Solid State Devices and Materials

Presentation information

Print

Oral Presentation

02: Advanced and Emerging Memories / New Applications

[J-10] DRAM, SRAM, and 3D NAND

Thu. Sep 29, 2022 4:00 PM - 5:45 PM 303 (3F)

Session Chair: Norikatsu Takaura (Hitachi, Ltd.), Soichi Sugiura (Micron Technology Inc.)

4:30 PM - 4:45 PM

[J-10-03] Evaluate the Impact of Process Variations on Storage Node Contact Area Under Different Etching Models

〇Ye Xiao Yu1, Zhong Ming Liu1, Jing Si Cui1 (1. Changxin corporate (China))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.J-10-03

Abstract password authentication.
Password to download abstracts has been informed in the confirmation mail.

Password