2023 International Conference on Solid State Devices and Materials

講演情報

Oral Presentation

02: Advanced and Emerging Memories / New Applications

[E-4] 3D NAND

2023年9月7日(木) 10:45 〜 12:00 Room E (223, Bldg. 2)

Session Chairs: Keiji Hosotani (KIOXIA), Ming-Hsiu Lee (Macronix International Co., Ltd)

11:15 〜 11:30

[E-4-02] Compact Thermally Stable High Voltage FinFET with 40nm Tox and Lateral Break-Down>35V for 3D NAND Flash Periphery Application

Alessio Spessot1, Philippe Matagne1, Hiroaki Arimura1, Jishnu Ganguly1, Romain Ritzenthaler1, Joao Bastos1, Ritam Sarkar1, Elena Capogreco1, Yangyin Chen1,2, Naoto Horiguchi1 (1. imec (Belgium), 2. Western Digital (Belgium))

https://doi.org/10.7567/SSDM.2023.E-4-02

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