2023 International Conference on Solid State Devices and Materials

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Oral Presentation

10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[E-5] Oxide semiconductor TFTs and technology

Fri. Sep 8, 2023 9:00 AM - 10:15 AM Room E (223, Bldg. 2)

Session Chairs: Juan Paolo Bermundo (NAIST), Jun Koyama (Semiconductor Energy Lab.)

9:30 AM - 9:45 AM

[E-5-03] Rapid Thermal Crystallization of H-doped InO x for Thin Film Transistors

○Xiaoqian Wang1, Mamoru Furuta1 (1. Kochi Univ. of Tech. (Japan))

https://doi.org/10.7567/SSDM.2023.E-5-03

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