High Quality GaN Epitaxy and SAW Resonators on Sapphire Substrates with Cross-Stacked Carbon Nanotube Films

lei xiao

doi:https://doi.org/10.7567/SSDM.2023.PS-4-09

[PS-4-09] High Quality GaN Epitaxy and SAW Resonators on Sapphire Substrates with Cross-Stacked Carbon Nanotube Films

^○lei xiao¹, Guofang Yu¹, Renrong Liang¹, Jun Xun¹, Yang Wei¹, Jing Wang¹ (1. Univ. of Tsinghua (China))

https://doi.org/10.7567/SSDM.2023.PS-4-09

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講演情報

[PS-4] 04: Power / High‐speed Devices and Materials

[PS-4-09] High Quality GaN Epitaxy and SAW Resonators on Sapphire Substrates with Cross-Stacked Carbon Nanotube Films

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