[2-5] Self Aligned GaAs Schottky Barrier Gate FET using Preferential Etching

Yasuo Tarui, Yoshio Komiya, Takao Yamaguchi (1.Electrotechnical Laboratory)

1972 Conference on Solid State Devices |PDF Download

[S-3] Ion Implantation & Device Technology (I)

M. Yasufuku H. Kodera (1.Fujitsu Co., Ltd., 2.Hitachi Ltd.)

1972 Conference on Solid State Devices |PDF Download

[3-1] NEW SEMICONDUCTOR BUBBLE DOMAIN DETECTOR EMPLOYING THE HALL EFFECT ASSOCIATED WITH AN INVERTED MAGNETIC FIELD

Shoei Kataoka, Hideo Yamada, Yoshinobu Sugiyama (1.Electrotechnical Laboratory)

1972 Conference on Solid State Devices |PDF Download

[3-2] A New Spectroscopic Method of Measuring Transient Temperature Distribution in High Power Thyristors

Junji Sakurai (1.Toshiba Research and Development Center, Tokyo Shibaura Electric Co., Ltd.)

1972 Conference on Solid State Devices |PDF Download

[3-3] INPROVEMENT OF THE SHALLOW BASE TRANSISTOR TECHNOLOGY BY USE OF A DOPED POLY-SILICON DIFFUSION SOURCE

M. Takagi, K. Nakayama, C. Terada, H. Kamioka (1.IC Engineering Department, Fujitsu Limited)

1972 Conference on Solid State Devices |PDF Download

[S-4] Ion Implantation & Device Technology (II)

S. Namba, T. Tokuyama, M. Tsurushima, H. Ohmura (1.Osaka University, 2.Hitachi Ltd., 3.Electrotechnical Laboratory, 4.Tokyo Shibaura Electric Co., Ltd.)

1972 Conference on Solid State Devices |PDF Download

[4-1] Low Energy Implantation of Boron into Silicon

N. Yoshihiro, T. Tokuyama (1.Central Reseach Laboratory, Hitachi Ltd.)

1972 Conference on Solid State Devices |PDF Download

[4-2] Observation of Lattice Defects in Ion-Implanted Si Wafer by A Double Crystals Spectrometer Method

Seigo KISHNO, Atsuko NODA (1.Central Research Laboratory, Hitachi, Ltd.)

1972 Conference on Solid State Devices |PDF Download

[4-3] Study on Three-Dimensional Distribution of Implanted Ions by He+ Backscattering Technique

Hiroshi ISHIWARA, Seijiro FURUKAWA, Hideki MATSUMURA, Nobuyoshi NATSUAKI (1.Department of Physical Electronics, Faculty of Engineering Tokyo Institute of Technology)

1972 Conference on Solid State Devices |PDF Download

[4-4] Ion Implantation of Te and Sb in GaAs

Kenji Gamo, Mikio Takai, Kohzoh Masuda, Susumu Namba (1.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)

1972 Conference on Solid State Devices |PDF Download