[A-0-1] Recent Progress in Magnetic Bubble Devices and Materials

Hsu Chang (1.IBM, Thomas J. Watson Research Center)

1975 Conference on Solid State Devices |PDF ダウンロード

[A-1-1] A New Chemical Dry Etching

Y. Horiike、M. Shibagaki (1.Toshiba Research and Development Center Tokyo Shibaura Electric Co., Ltd.)

1975 Conference on Solid State Devices |PDF ダウンロード

[A-1-2] MICROFABRICATION TECHNIQUE BY GAS PLASMA ETCHING METHOD

H. KOMIYA、H. TOYODA、T. KATO、K. INABA (1.Central Research Lab., Mitsubishi Electric Corp.)

1975 Conference on Solid State Devices |PDF ダウンロード

[A-1-3] Microfabrication of Anti-Reflective Chromium Mask by Gas Plasmas

Haruhiko ABE、Kyusaku NISHIOKA、Setsuko TAMURA、Akira NISHIMOTO (1.Central Research Laboratories, Mitsubishi Electric Corp.、2.Kitaitami Works, Mitsubishi Electric Corp.)

1975 Conference on Solid State Devices |PDF ダウンロード

[A-2-1] Semi-Insulating Polycrystalline-Silicon (SIPOS) Passivation Technology

T. Matsushita、T. Aoki、T. Otsu、H. Yamoto、H. Hayashi、M. Okayama、Y. Kawana (1.SONY Corporation, Atsugi Plant)

1975 Conference on Solid State Devices |PDF ダウンロード

[A-2-2] SEMI-INSULATING POLYCRYSTALLINE SILICON (SIPOS) FILMS APPLIED TO MOS INTEGRATED CIRCUITS

H. Yamoto、M. Okayama、T. Aoki、H. Mochizuki、M. Abe、T. Ando (1.SONY Corp. Semiconductor Product Div. and Semiconductor Development Div. Atsugi Plant)

1975 Conference on Solid State Devices |PDF ダウンロード

[A-2-3] Application of Diffusion from Implanted Polysilicon to Bipolar Transistors

Y. AKASAKA、K. TSUKAMOTO、M. KAWAGUCHI、H. SATO、K. HORIE、H. KOMIYA (1.Central Research Laboratory, Kitaitami Works, Mitsubishi Electric Corp.)

1975 Conference on Solid State Devices |PDF ダウンロード

[A-3-1] Low Temperature Annealing Characteristics of Phoshorus-Implanted Silicon

M. Miyao、N. Natsuaki、N. Yoshihiro、M. Tamura、T. Tokuyama (1.Central Research Laboratory, Hitachi Ltd.)

1975 Conference on Solid State Devices |PDF ダウンロード

[A-3-2] Micro-probe Auger Analysis of Si Migration in Al Metallization for LSI

T. Inoue、S. Horiuchi、H. Shimizu、T. Ishida (1.Toshiba R & D Center, Electrotechnical Lab. Nippon Electric Varian Co.)

1975 Conference on Solid State Devices |PDF ダウンロード

[A-3-3] Some Applications of Ion Microprobe Analysis to Problems in Semiconductor Devices

Hiroshi Doi、Ichiro Kanomata (1.Central Research Laboratory, Hitachi Ltd.)

1975 Conference on Solid State Devices |PDF ダウンロード