[A-6-3] An Electron Beam Exposure System (VL-RI)

M. Sumi、M. Ninomiya、F. Chiba、M. Nakasuji、S. Sano、Y. Takeishi (1.Cooperative Laboratories, VLSI Technology Research Association)

1978 Conference on Solid State Devices |PDF ダウンロード

[A-6-4] MOS LSI Fabrication Process Using Direct Electron Beam Writing

Y. Sakakibara、E. Arai、H. Yoshino、T. Kobayashi、H. Akiya、K. Hirata (1.Musashino Electrical Communication Laboratory, NTT)

1978 Conference on Solid State Devices |PDF ダウンロード

[A-6-5] Monte Carlo Simulation of Alignment Mark Signal for Direct Electron-Beam Writing

Naoaki Aizaki (1.Cooperative Laboratories, VLSI Technology Research Association)

1978 Conference on Solid State Devices |PDF ダウンロード

[A-7-1] A NEW BIPOLAR TRANSISTOR WITH GATES PROJECTED INTO COLLECTOR REGION

Hisao KONDO、Mikio BESSHO、Yoshinori YUKIMOTO (1.Semiconductor Laboratory, Mitsubishi Electric Corporation)

1978 Conference on Solid State Devices |PDF ダウンロード

[A-7-2] A 380Hx488V CCD Imager with Narrow Channel Transfer Gates

Yoshiaki Daimon-Hagiwara、Motoaki Abe (1.Sony Corporation Research Center, Semiconductor Development Division)

1978 Conference on Solid State Devices |PDF ダウンロード

[B-4-1] Macroscopic Theory of Injection Lasers

Y. Suematsu M. Yamada (1.Tokyo Institute of Technology、2.Kanazawa University)

1978 Conference on Solid State Devices |PDF ダウンロード

[B-4-2] GaAs ACOUSTIC DISTRIBUTED FEEDBACK LASERS

M. YAMANISHI、T. KAWAMURA、K. TSUBOUCHI、N. MIKOSHIBA (1.Department of Electrical Engineering, University of Osaka Prefecture、2.Research Institute of Electrical Communication, Tohoku University)

1978 Conference on Solid State Devices |PDF ダウンロード

[B-5-1] The Elimination of Contact Degradation in Lead-Salt Diode Lasers

Wayne Lo (1.Physics Department, General Motors Research Laboratories)

1978 Conference on Solid State Devices |PDF ダウンロード

[B-5-2] High temperature single-mode cw operation with a TJS laser using a semi-insulating GaAs substrate

H. Kumabe、T. Tanaka、H. Namizaki、S. Takamiya、W. Susaki (1.Semiconductor Laboratory, Mitsubishi Electric Corporation)

1978 Conference on Solid State Devices |PDF ダウンロード

[B-5-3] Influence of Ambient Gas on the PL Intensity from InP and GaAs

H. Nagai、Y. Noguchi、Y. Mizushima (1.Musashino Electrical Communication Laboratory Nippon Telegraph and Telephone Public Corporation)

1978 Conference on Solid State Devices |PDF ダウンロード