[A-0-1] Circuit Simulation of Three-Dimensional Device in Beam-Recrystallized Polysilicon Films

James F. Gibbons、Martin D. Giles、James C. Sturm、James T. Walker (1.Stanford Electronics Laboratory, Stanford University)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-0-2] Evolution of New Device Concepts in Quantum-Well and Superlattice Structures

Hiroyuki Sakaki (1.Institute of Industrial Science, University of Tokyo)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-1-1] Silicon Molecular Beam Epitaxy

Yasuhiro SHIRAKI (1.Central Research Laboratory, Hitachi, Ltd.)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-1-2] Study on Formation of Solid-Phase-Epitaxial CoSi2, Films and Patterning Effects

Kouichirou Ishibashi、Hiroshi Ishiwara、Seijiro Furukawa (1.Graduate School of Science and Engineering, Tokyo Institute of Technology)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-1-3] Ultra-Smooth Heteroepitaxial NiSi2, Films on Silicon Grown by Molecular Beam Epitaxy

A. Ishizaka、Y. Shiraki、K. Nakagawa、E. Maruyama (1.Central Research Laboratory, Hitachi, Ltd.)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-1-4] Fraction of Interstitialcy Mechanism in Impurity Diffusion in Silicon

Satoru Matsumoto、Yutaka Ishikawa、Tatsuya Niimi (1.Department of Electrical Engineering, Keio University、2.Department of Applied Physics, Tokai University)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-2-1] Laser Recrystallized SOI

M. Tamura、M. Ohkura、N. Natsuaki、M. Miyao、T. Tokuyama (1.Central Research Laboratory, Hitachi Ltd.)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-2-2] Crystallinity of Recrystallized Si on SiO2, by Zone Melting Method

Kohei Higuchi、Shuichi Saitoh、Hidekazu Okabayashi (1.Microelectronics Research Labs., NEC Corporation)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-2-3] Formation of Si Epi./MgO･Al2O3 Epi./SiO2/Si and Its Epitaxial Film Quality

Masao Mikami、Yasuaki Hokari、Koji Egami、Hideki Tsuya、Masaru Kanamori (1.Fundamental Research Laboratories and Microelectronics Laboratories, NEC Corporation)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-2-4] Recrystallization of Polycrystalline Silicon Islands on Fused Silica

Yutaka Kobayashi、Akira Fukami、Takaya Suzuki (1.Hitachi Research Laboratory, Hitachi, Limited)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード