[B-11-1] Orientation Control of SOI Film by Laser Recrystallization

K. Sugahara、S. Kusunoki、Y. Inoue、T. Nishimura、Y. Akasaka (1.LSI Research and Development Laboratory Mitsubishi Electric Corporation)

1986 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-11-2] Multi-Level SOI Recrystallization Using a Novel Seed Structure

T. Hamasaki、T. Inoue、M. Yoshimi、T. Yoshii、H. Tango (1.VLSI Research Center, Toshiba Corporation)

1986 International Conference on Solid State Devices and Materials |PDF ダウンロード

Susumu Horita、Hiroshi Ishiwara (1.Department of Applied Electronics, Tokyo Institute of Technology)

1986 International Conference on Solid State Devices and Materials |PDF ダウンロード

M. P. A. VIEGERS、B. H. KOEK、A. H. van OMMEN (1.Philips Research Laboratories)

1986 International Conference on Solid State Devices and Materials |PDF ダウンロード

Seigo KANEMARU、Hiroshi ISHIWARA、Seijiro FURUKAWA (1.Graduate School of Science and Engineering, Tokyo Institute of Technology)

1986 International Conference on Solid State Devices and Materials |PDF ダウンロード

Klaus Ploog (1.Max-Planck-Institut fur Festkorperforschung)

1986 International Conference on Solid State Devices and Materials |PDF ダウンロード

H. Nagai、M. Yamanishi、Y. Kan、I. Suemune、Y. Ide、R. Lang (1.Department of Physical Electronics, Faculty of Engineering, Hiroshima University)

1986 International Conference on Solid State Devices and Materials |PDF ダウンロード

Y. Kan、M. Yamanishi、Y. Usami、I. Ogura、I. Suemune (1.Department of Physical Electronics, Faculty of Engineering, Hiroshima University)

1986 International Conference on Solid State Devices and Materials |PDF ダウンロード

Noriyuki OKISU、Yasuo SAMBE、Takeshi KOBAYASHI (1.Faculty of Engineering Science, Osaka University)

1986 International Conference on Solid State Devices and Materials |PDF ダウンロード

L. Tapfer、W. Stolz、K. Ploog (1.Max-Planck-Institut fur Festkorperforschung、2.NTT Research Laboratories)

1986 International Conference on Solid State Devices and Materials |PDF ダウンロード