[A-3-1] Lateral Autodoping Suppression by Selective Epitaxy Capping and Its Application in High Speed BiCMOS

Tzu-Yin Chiu, Kwing F. Lee, Maureen Y. Lau, Sean N. Finegan, Mark D. Morris, Alexander M. Voshchenkov (1.AT&T Bell Laboratories)

https://doi.org/10.7567/SSDM.1988.A-3-1