[A-3-1] Lateral Autodoping Suppression by Selective Epitaxy Capping and Its Application in High Speed BiCMOS

Tzu-Yin Chiu、Kwing F. Lee、Maureen Y. Lau、Sean N. Finegan、Mark D. Morris、Alexander M. Voshchenkov (1.AT&T Bell Laboratories)

https://doi.org/10.7567/SSDM.1988.A-3-1