[A-7-3] Lateral Diffusion of Dopants beyond Preamorphized Region

T. IZAWA, M. KASE, H. MORI, K. KOBAYASHI, M. NAKANO (1.Advanced Tech. Division and Process Development Division, FUJITSU LTD.)

https://doi.org/10.7567/SSDM.1988.A-7-3