[A-8-1] Excimer Laser Doping for Sub-Micron Device Fabrication

H. Tomita, M. Negishi, T. Sameshima, H. Hayashi, S. Usui (1.Sony Research Center and, 2.Sony Semiconductor Group R. and D. Department)

https://doi.org/10.7567/SSDM.1988.A-8-1