[A-8-1] Excimer Laser Doping for Sub-Micron Device Fabrication

H. Tomita、M. Negishi、T. Sameshima、H. Hayashi、S. Usui (1.Sony Research Center and、2.Sony Semiconductor Group R. and D. Department)

https://doi.org/10.7567/SSDM.1988.A-8-1