[C-1-1] Effect of Annealing on the SOI Structure Formed by Large Dose Oxygen Implantation

Nan-Xiang Chen, Wei Miao, Zhong-Lie Wang, Chang Huang (1.Inst. of Low Energy Nuclear Physics, Beijing Normal University, 2.Shaanxi Eishan Micro-Electronics Institute)

https://doi.org/10.7567/SSDM.1988.C-1-1