[C-1-6] Si on SiO2 by Solid-State Diffusion Bonding (SSDB) Technology XU XIAO-LI、ZHAN JUAN、SHEN HUA、TONG QIN-YI (1.Microelectronics Center, Nanjing Institute of Technology) https://doi.org/10.7567/SSDM.1988.C-1-6
