[D-1-7] Effects of PAsxNy Deposition Conditions on the Characteristics of In0.53 Ga0.47As Metal-insulator-Semiconductor Field Effect Transistors

Y. Iwase, A. Kawahara, F. Arai, T. Sugano (1.Department of Electronic Engineering, University of Tokyo)

https://doi.org/10.7567/SSDM.1988.D-1-7