Surface Reformed Thick Spin-on-glass for Planar Interconnection

S. Ito; Y. Homma; E. Sasaki; S. Uchimura; H. Morishima

doi:https://doi.org/10.7567/SSDM.1988.LA-6-2

1988 International Conference on Solid State Devices and Materials

Aug 24, 1988 - Aug 26, 1988
Keio Plaza Hotel, Tokyo, Japan

[LA-6-2] Surface Reformed Thick Spin-on-glass for Planar Interconnection

S. Ito, Y. Homma, E. Sasaki, S. Uchimura, H. Morishima (1.Central Research Laboratory, Hitachi Ltd., 2.Hitachi VLSI Engineering Corp., 3.Hitachi Chemical Co., Ltd.)

https://doi.org/10.7567/SSDM.1988.LA-6-2

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