The Japan Society of Applied Physics

[LA-6-5] Performance Improvement in Fully Depleted Thin Film SOI MOSFETs

Y. Yamaguchi, H. Miyatake, S. Kusunoki, T. Nishimura, Y. Akasaka (1.LSI Research and Development Laboratory, 2.Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1988.LA-6-5