[S-II-2] Development of an Innovative 5μmφ Focused X-ray Beam Energy Dispersive Spectrometer for Analyzing Residual Stresses and Impurities in ULSIs

Naoki Yamamoto, Yukio Takano, Yoshinori Hosokawa, Kenji Yoshino (1.Central Research Laboratory, Hitachi, Ltd., 2.Research and Development Div., Horiba, Ltd.)

https://doi.org/10.7567/SSDM.1988.S-II-2