[S-II-2] Development of an Innovative 5μmφ Focused X-ray Beam Energy Dispersive Spectrometer for Analyzing Residual Stresses and Impurities in ULSIs

Naoki Yamamoto、Yukio Takano、Yoshinori Hosokawa、Kenji Yoshino (1.Central Research Laboratory, Hitachi, Ltd.、2.Research and Development Div., Horiba, Ltd.)

https://doi.org/10.7567/SSDM.1988.S-II-2