[A-1-4] The Influence of Synchrotron X-Ray Damage on Hot-Carrier-Induced Degradation in Subquarter-Micron NMOSFETs

T. Tsuchiya、M. Harada、K. Deguchi、T. Matsuda (1.NTT LSI Laboratories)

https://doi.org/10.7567/SSDM.1991.A-1-4