[A-4-4] Atomic Layer Control of Germanium and Silicon on Silicon Using Flash Heating in Ultraclean Chemical Vapor Deposition

Masao SAKURABA, Junichi MUROTA, Nobuo MIKOSHIBA, Shoichi ONO (1.Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1991.A-4-4