[A-4-4] Atomic Layer Control of Germanium and Silicon on Silicon Using Flash Heating in Ultraclean Chemical Vapor Deposition

Masao SAKURABA、Junichi MUROTA、Nobuo MIKOSHIBA、Shoichi ONO (1.Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1991.A-4-4