[A-6-1] Fabrication of Double-Gate Thin-Film SOI MOSFETs Using Wafer Bonding and Polishing

H. Horie, S. Ando, T. Tanaka, M. Imai, Y. Arimoto, S. Hijiya (1.Fujitsu Laboratories Ltd.)

https://doi.org/10.7567/SSDM.1991.A-6-1