[A-6-3] A Novel Fabrication Technique of Multi-Layer-Stacked SOI Structures Applicable to 3D-ICs

K. Kawai、S. Nakanishi、H. Ogata、T. Yamaji、N. Oda、K. Yoneda (1.ULSI research Center, Sanyo Electric Co., Ltd.)

https://doi.org/10.7567/SSDM.1991.A-6-3