[A-6-3] A Novel Fabrication Technique of Multi-Layer-Stacked SOI Structures Applicable to 3D-ICs

K. Kawai, S. Nakanishi, H. Ogata, T. Yamaji, N. Oda, K. Yoneda (1.ULSI research Center, Sanyo Electric Co., Ltd.)

https://doi.org/10.7567/SSDM.1991.A-6-3