[A-8-2] Recent Development in Excimer Laser Lithography for 64 M and 256 MBit DRAMs

Masaru SASAGO、Yoshiyuki TANI、Kazuhiro YAMASHITA、Masayuki ENDO、Noboru NOMURA (1.Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd.)

https://doi.org/10.7567/SSDM.1991.A-8-2