Tunnel Structured Stacked Capacitor Cell (TSSC) for 64 MBit dRAMs

N. Matsuo; Y. Nakata; H. Ogawa; T. Yabu; S. Matsumoto; M. Sasago; S. Okada

doi:https://doi.org/10.7567/SSDM.1991.A-8-3

1991 International Conference on Solid State Devices and Materials

Aug 27, 1991 - Aug 29, 1991
Pacifico Yokohama, Yokohama, Japan

[A-8-3] Tunnel Structured Stacked Capacitor Cell (TSSC) for 64 MBit dRAMs

N. Matsuo, Y. Nakata, H. Ogawa, T. Yabu, S. Matsumoto, M. Sasago, S. Okada (1.Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.1991.A-8-3

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