[A-8-3] Tunnel Structured Stacked Capacitor Cell (TSSC) for 64 MBit dRAMs

N. Matsuo、Y. Nakata、H. Ogawa、T. Yabu、S. Matsumoto、M. Sasago、S. Okada (1.Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.1991.A-8-3