[PB1-1] Electrical Properties of PLZT Thin Films Prepared by a Sol-Gel Method

T. Okudaira, A. Hachisuka, N. Soyama, K. Ogi, H. Arima, T. Matsukawa, K. Horie (1.Mitsubishi Electric Corp. LSI Lab., 2.Mitsubishi Electric Corp. Kitaitami Works, 3.Mitsubishi Material Corp. Central Research Institute)

https://doi.org/10.7567/SSDM.1991.PB1-1