[PB6-2] Structural and Electrical Improvement of GaAs on Si by Multi-Step Rapid Thermal Annealing Treatment

Mingxiang Li、Qinyi Tong、Qinde Zhuang Gong Zou、J. Deboeck、M. Van Rossum、G. J. Declerck (1.Microelectronics Center, Southeast Univ.、2.IMEC)

https://doi.org/10.7567/SSDM.1991.PB6-2