[PB6-2] Structural and Electrical Improvement of GaAs on Si by Multi-Step Rapid Thermal Annealing Treatment

Mingxiang Li, Qinyi Tong, Qinde Zhuang Gong Zou, J. Deboeck, M. Van Rossum, G. J. Declerck (1.Microelectronics Center, Southeast Univ., 2.IMEC)

https://doi.org/10.7567/SSDM.1991.PB6-2