[PB7-2] In-situ Counting of Process-Induced Particle

Kaoru Kondo, Kazuo Ichijo, Keisuke Shinohara, Tamio Hoshina, Kazuo Tsubouchi, Kazuya Masu (1.RION CO., Ltd., 2.Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1991.PB7-2