Low Temperature Operation of Polycrystalline Silicon Thin Film Transistors

H. Mori; K. Hata; T. Hashimoto; I-Wei Wu; A. G. Lewis; M. Koyanagi

doi:https://doi.org/10.7567/SSDM.1991.PC5-10

1991 International Conference on Solid State Devices and Materials

Aug 27, 1991 - Aug 29, 1991
Pacifico Yokohama, Yokohama, Japan

[PC5-10] Low Temperature Operation of Polycrystalline Silicon Thin Film Transistors

H. Mori, K. Hata, T. Hashimoto, I-Wei Wu, A. G. Lewis, M. Koyanagi (1.Research Center for Integrated Systems, Hiroshima University, 2.Palo Alto Research Center, Xerox Co.)

https://doi.org/10.7567/SSDM.1991.PC5-10

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