[PC5-13] C-MOS Self-Aligned Low Temperature Poly-Si TFTs Fabricated by Laser Annealing of Poly-Si Films

Tsutomu HASHIZUME、Satoshi INOUE、Takashi INAMI、Takashi NAKAZAWA、Ichio YUDASAKA、Hiroyuki OHSHIMA (1.SEIKO EPSON CORPORATION TFT Research Laboratory)

https://doi.org/10.7567/SSDM.1991.PC5-13