The Japan Society of Applied Physics

[PC5-15] Low Temperature Poly-Si TFTs Using Solid Phase Crystallization (SPC) of Very Thin Films and an ECR-CVD Gate Insulator

Thomas W. LITTLE、Ken-ichi TAKAHARA、Hideki KOIKE、Takashi NAKAZAWA、Ichio YUDASAKA、Hiroyuki OHSHIMA (1.SEIKO EPSON CORPORATION TFT Research Laboratory)

https://doi.org/10.7567/SSDM.1991.PC5-15