[PC5-15] Low Temperature Poly-Si TFTs Using Solid Phase Crystallization (SPC) of Very Thin Films and an ECR-CVD Gate Insulator
Thomas W. LITTLE、Ken-ichi TAKAHARA、Hideki KOIKE、Takashi NAKAZAWA、Ichio YUDASAKA、Hiroyuki OHSHIMA
(1.SEIKO EPSON CORPORATION TFT Research Laboratory)
https://doi.org/10.7567/SSDM.1991.PC5-15