[PC5-6] Comparison of Different Processes in the Fabrication of Crystallized Amorphous Silicon Thin Film Transistors

N. T. Tran, M. P. Keyes, S. Shiffman, G. Liu, S. J. Fonash (1.Graphic Research Lab., 2.Center for Electronic Materials & Processing The Pennsylvania State University)

https://doi.org/10.7567/SSDM.1991.PC5-6